Micromechanics group logo
Dynamic Profilimetry

Interferometric techniques provide inherent depth information. By imaging the interference pattern generated by a Mirau interferometer as the reference position is moved, the depth profile of a target structure can be determined. Combining this technique with computer microvision allows us to measure the profile of a target as a function of stimulus phase. In this image, beam 4 is driven by a sinusoidal voltage while beam 1 is not driven. The measurements show that the driven beam moves significantly more, but a small amount of crosstalk causes beam 1 to move slightly.