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Motion Measurements With Three Degrees Of Freedom

Images of a moving structure taken at a single plane of focus provide information about three independent degrees of freedom of motion: displacement in the x and y directions (within the plane of focus), and rotation within this plane. This image shows the displacement of a MEMS device moving in response to a sinusoidal stimulus. The primary component of motion is in the y direction (up-and-down on the screen), and is roughly 400 nanometers peak-to-peak. Motion in the x direction (left-and-right) is below the noise floor of the measurement technique. Rotation of the device within the plane of focus is also below the noise floor.