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Stroboscopic Mirau Interferometry

This technique combines Mirau interferometry with stroboscopic illumination. As the stimulus is applied, the target moves in the direction of the microscope axis. This motion causes the brightness at each location on the target to change from one image to the next. By calibrating the change in brightness to a change in target height (as described here), the motion of the target can be quantified. In this image, the comb drive is moving in a see-saw motion, with the bottom teeth moving up while the top teeth move down. The outer pair of teech and the two support beams in the center of the image are anchored to the substrate and do not move, so their interference pattern does not shift with time.