Stroboscopic Mirau Interferometry
This technique combines Mirau interferometry with
As the stimulus is applied, the target moves in the direction of the
This motion causes the brightness at each location on the target to change
from one image to the next.
By calibrating the change in brightness to a change in target height (as described here), the motion of the target can be
In this image, the comb drive is moving in a see-saw motion, with the
bottom teeth moving up while the top teeth move down.
The outer pair of teech and the two support beams in the center of the
image are anchored to the substrate and do not move, so their interference
pattern does not shift with time.