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Measuring Motion Interferometrically

Using the stroboscopic Mirau interferometry technique, the motion of the comb drive can be quantified in three orthogonal directions — translation in the direction of the microscope axis, and rotation about each of the two axes of the imaging plane. The measurements shown here demonstrate that under the stimulus conditions used here (driving the bottom teeth only), the comb drive both translates and rotates about the x axis, but does not show any significant rotation about the y axis.