Measuring Motion Interferometrically
Using the stroboscopic Mirau interferometry
technique, the motion of the comb drive can be quantified in three
orthogonal directions — translation in the direction of the
microscope axis, and rotation about each of the two axes of the imaging
plane.
The measurements shown here demonstrate that under the stimulus conditions
used here (driving the bottom teeth only), the comb drive both translates
and rotates about the x axis, but does not show any significant
rotation about the y axis.
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![[picture]](pics/mirauMotion.00x.gif)