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Motion Compensation

Measuring motions from images provides a built-in check on the accuracy of the measurements. Once the displacement of a structure from one image to the next is determined, the images can be moved to subtract this displacement. If the motion measurements are accurate, the target should be stationary in the resulting images. In this movie, the measured rotational motion of the MEMS device (the central wedge) was subtracted from the individual images. In the resulting movie the moving target appears stationary, while the surrounding objects appear to move.