![[picture]](pics/small.failorig.gif)
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MEMS Devices:
MEMS, or MicroElectroMechanical Systems, are microfabricated devices with
mechanical components. This image shows measurements of the motion of a
reliability test structure, designed by Exponent Inc.
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![[picture]](pics/small.failcomp.gif)
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Verifying Motion Measurements:
One advantage of computer microvision is the ability to visually verify
motion measurements. This figure shows the result of shifting a set of
images to compensate for the measured motion of the test structure.
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![[picture]](pics/small.xyrM.00x.gif)
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Multi-Dimensional Motion
Measurements:
Unlike many motion measurement systems, computer microvision is inherently
multi-dimensional. This image shows measurements of the motion of a MEMS
structure in two translational and one rotational directions.
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![[picture]](pics/small.dprofile.00x.gif)
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Profilimetry:
Interferometric methods allow measurements of the absolute position of MEMS
devices, a technique called profilimetry. This image shows the dynamic
profile of a MEMS diffraction grating.
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