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My talk is about testing MEMS. By definition, MEMS are micro-electro-mechanical systems. Therefore, testing MEMS includes testing a variety of types of signals, including at the very least electrical and mechanical signals. And while we have an array of powerful tools to test electrical behaviors of microfabricated systems, we have by contrast relatively few tools with which to measure micromechanical behaviors. Our group has developed tools to measure micromechanical behaviors of MEMS based on video microscopy.

My talk will have three parts. First, I'll describe our method for measuring micromechanical behaviors. Then I'll describe two case studies: one in which we worked with Exponent Failure Analysis Associates to calibrate a fatigue test structure that they designed, and one in which we worked with Draper Laboratory to analyze motions of their microfabricated gyroscope.

• Computer Microvision Method
• 3D Motions of Fatigue Test Structure
• 3D Motions of Microfabricated Gyroscope