MEMS are fabricated using batch manufacturing techniques similar to those used to make electronic devices. Unlike electronics, however, simple methods for testing micromechanical devices do not exist. This limitation has important consequences for the design and manufacture of MEMS. Since designers cannot SEE the motions of the structures that they build, mechanical problems can go undiscovered until after many costly prototypes have been built. Furthermore, manufacturing costs can be high since mechanical testing may not be practical until late in the manufacturing process -- perhaps not even until after packaging. For these reasons, our group is interested in developing tools to measure micromechanical motions.

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